Telemark 861 Deposition Controller
A direct pin-to-pin compatible replacement for Maxtek MDC 360 and Telemark 860 / 880 deposition controllers
- High frequency internal reference oscillator provides <0.01A resolution for aluminum
- Operates with 5 MHz or 6 MHz crystals
- All new innovative crystal oscillator design for outstanding stability and noise immunity
- Extensive materials library, also allowing for user definable materials
- Color LCD touch screen for graphical and numerical display of primary real-time process data, providing an intuitive and user friendly operator interface
- Touch screen capabilities:
- In-process parameter modification
- Process and Layer editor
- I/O status and control
- Real time graphical display of: Power v/s time, Rate v/s time, Rate deviation v/s time
- All system, film and setup files may be saved via a front panel USB port, as well as uploaded to instrument
- Can accomodate up to 99 processes of 999 layers each
- Standard unit has 2 crystal sensor inputs and 2 isolated rate control analog output drivers, expandable to 4 each
- 8 relay isolated outputs and 8 optically isolated inputs (for both active and passive mode), with the option to upgrade to 16 ea. (Telemark 880 configuration) or 32 ea. (Maxtek 360 or Telemark 860 configuration)
- Specifications
- Sensor Crystal Frequency: 5 or 6 MHz
- Resolution: <0.02Hz (<0.01A for Al @ 6MHz)
- Accuracy: +/- 0.5% thickness
- Thickness Display: 0.000-999.9 kÅ
- Power Display: 0.00-999 Å/s
- Rate: 0.00-999 Å/s
- Measurement Update: 10 per second
- Control signal Update: 10 per second
- Inputs: 8 optically isolated, active (4 to 24V DC or AC), or passive (contact closure)
- Outputs: 8 relay contacts NO/NC @ max 1A, 24 V DC or AC
- Analog Outputs: 0-5VDC or 0-10VDC (either polarity)
- Power Input: 90-260VAC, 50-60Hz
Accessories for all Controllers and Monitors
We deliver accessories like additional boards, quartz sensor heads for HV and UHV with or without shutter in standard configurations and custom design.We also provide sensor head feedthroughs, quartzes and many more.
Please contact us for further details.
Brochures can be downloaded here.
