Image

Telemark High Voltage Power Supplies for EBeam evaporators

Telemark Tetrode-tube High Voltage Power Supplies for EBeam evaporators

Modell TT-10/15/20

with maximum power of 10/15/20 kW

 

 
 

 

  • simultaneous operation of up to three sources

  • power regulation by a long life tetrode tube; very short response time for effective suppression of arcs

  • high voltage stability: <5%

  • stability of emission current: <1%

  • external control of high voltage and current via PLC interface

  • remote control for sweep and HV/emission is included

  • optional programmable sweep module "Cheetah"

  • air cooling

 

Model TT-3/6/8

with maximum power of 3/5/6/8 kW

 

 
 

 

  • tetrode tube for long life and very short response times for effective suppression of arcs

  • constant high voltage maintains a stable beam position

  • integration in 19“ racks possible

  • standard sweep module with sawtooth and oscillating circle

  • optional programmable sweep module "Cheetah"

  • air cooling

 

 

 

Specifications of Telemark tetrode tube high voltage power supplies for Ebam evaporators
model TT-3 TT-6 TT-8 TT-10 TT-15 TT-20
maximum power 3,5kW 6kW 8kW 10kW 15kW 20kW
simultaneous sources 1 1 1 up to 3 up to 3 up to 3
maximum emission current 500mA @ -7kV 750mA @ -8kV 800mA @ -10kV 1,0A @ -10kV 1,5A @ -10kV 1,7A @ -12kV
HV (adjustable) -5kV to -7kV -6kV to -8kV -6kV to -10kV -4kV to -10kV -4kV to -10kV -4kV to -12kV
response time <100 microsec. <100 microsec. <100 microsec. <100 microsec. <100 microsec. <100 microsec.
filament supply 40A max. @ 8VAC 40A max. @ 8VAC 40A max. @ 8VAC 40A max. @ 8VAC 40A max. @ 8VAC 50A max. @ 8VAC
control voltage +/- 10VDC +/- 10VDC +/- 10VDC +/- 10VDC +/- 10VDC +/- 10VDC

Sweep modules

Telemark Digital Sweep with remote
  • 5 shapes available, triangular, sinusoidal, circle, line and point
  • Frequencies 0.1 – 100Hz
  • Repeatable Lissajous figures
  • Pocket center and limits are programmable
  • 8 Pattern memory
  • Coil current limits and “coils good” check

Spare parts

The table below contains the most important spare parts for Telemark high voltage power supplies. Please note that these devices may only be serviced by trained  technicians.

High Voltage is dangerous!

If you have any questions concerning your Telemark high voltage equipment please contact us. Our service staff is available for any repairs and regular maintenance.

Description Part Number Used on
Tetrode Tube 114-0009-1 TT-3, TT-6
Tetrode Tube 114-0076-1 TT-8
Tetrode Tube 114-0008-1 TT-10/15
Mother Board 120-0101-1 TT-3
Mother Board 120-0101-2 TT-6
Mother Board 120-0001-2 TT-8, TT-10/15
Red Deck 123-0007-1 TT-3
Red Deck 123-0001-1 TT-6
Red Deck 123-0045-1 TT-8
Red Deck 123-0044-1 TT10/15
HV-Capacitor 113-0009-1 TT-3, TT-6
HV-Capacitor 113-0043-1 TT-8
HV-Capacitor 113-0001-1 TT-10/15
HV-Diode 114-0001-1 TT-3, TT-6, TT-8, TT-10/15
Resistor 20MOhm, 10W 112-0004-1 TT-3, TT-6, TT-8, TT-10/15
Resistor 100Ohm, 225W 112-0001-1 TT-3, TT-6, TT-8, TT-10/20
Resistor, 75Ohm   TT-15
Air Switch 116-0020-1 TT-8, TT-10/15
Transformer for Mother Board 118-0007-1 TT-8, TT-10/15

About PST

PST GmbH offes you more than high quality components for Evaporation- and Sputter-Systems. We consult you before and after the sales. We are your consulting partner for refurbishment of old vacuum systems and the design of new systems. 

©2020 Plasma & Semiconductor Technologies GmbH

Search