Linear UHV Electron beam sources 575 / 578
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mounted with all feedthroughs on a DN 200CF flange (bigger flanges optionally available)
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automatic indexer as option
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operation down to 10-11 mbar possible
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maximum frequency of the X-Y- sweep coils is 75Hz
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robust construction, proven in many installations
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simple operation and maintenance
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basic deflection of the beam by permanent magnet, a failure of the sweep module has therefore no severe conseqences (beam stays in the pocket)
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long life filament, 270° beam deflection
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simple removing of the filament block by losing of one mounting screw
Application
The new Telemark UHV Electron Beam Evaporator models 575/578 are ideal for applications in R&D but also for production systems.
The compact design and the possibility to integrate up to five pockets with 15cm³ or up to 4 pockets with 40cm³ volume and a maximum power of 10kW (depending on material and pocket size), makes it the most versatile UHV multi-pocket e-beam evaporator on the market.
The e-beam evaporator features -like all Telemark e-beam evaporators a proven design which has made Telemark the worldwide leading manufacturer of electron beam evaporators.
Overview
| Specifications | Models | ||
|---|---|---|---|
| Beam deflection | 270° | 5 pockets 4cm³ each | 575-01 |
| Max. power | 8/10kW | 4 pockets 7cm³ each | 575-02 |
| Max. high voltage | -10kV | 3 pockets 15cm³ each | 575-03 |
| Emission current | 0-0.8/1A @-10kV | 7 pockets 4cm³ each | 575-04 |
| Cooling water | 6l/min | 6 pockets 7cm³ each | 575-05 |
| Max. baking temperature | 2200C | 4 pockets 15cm³ each | 575-06 |
| Distance flange to center of active pocket | 9 pockets 4cm³ each | 575-07 | |
| 575-01, 575-02, 575-03 | 279,4mm (11“) | 7 pockets 7cm³ each | 575-08 |
| All other models | 355,6mm (14,5“) | 5 pockets 15cm³ each | 575-09 |
| 2 pockets 40cm³ each | 578-01 | ||
| 3 pockets 25cm³ each | 578-02 | ||
| 4 pockets 40cm³ each | 578-03 | ||
| 4 pockets 25cm³ each | 578-04 |
Custom designs like a special flange (DN 200CF is minimum size) or a modified distance between the sealing surface of the flange and the center of the active pocket, shutter with actuator, cold roof, electric indexer, etc. are available on request.
If a flange DN 160CF is required, the earlier model 568 can still be delivered. Please contact us in this case for a quotation.
A brochure about our current UHV sources can be downloaded here.
Model 508
Features:
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simple design, very attractive price
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Vacuum brazed water lines allow operation down to 10-11 mbar
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1,5cm³ pocket volume, a sweep is not necessary, therefore the gun has no deflection coils
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270° beam deflection with permanent magnet
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bakable up to 250°C
Overview
| Specifications | Models | |||
|---|---|---|---|---|
| Beam deflection | 270° | Single pocket 508 | 508-01 | |
| Max. power | 3kW | Single pocket 508 on DN 40CF | 508-02 | |
| High voltage | -5kV | |||
| Emission current | up to 600mA @-5kV |
UHV electron beam source 508 on flange DN63CF designed like an Effusioncell
This special electron beam source can easily be installed like an effusioncell from the outside of the chamber into a DN 63CF port, even overhead, if a subliming material is to be evaporated. In this case the slug can be held in place by a special fixture.