Angstrom Sciences Magnetron Sputtering Technology

Versatile, Compact Design

ONYX® magnetron sputtering cathodes are ultra compact and specially designed for compatibility with complex multi-cathode cluster assemblies. This versatile construction allows scalability, making ONYX® magnetrons an ideal option for system upgrades and retrofit applications.

Total Power Compatibility

Low impedance sputter heads are RF, DC, mid-frequency DC, pulsed DC, and microwave power compatible.

Standard Fittings

Angstrom Sciences utilizes ISO NW standard fittings and Conflat® metal seal flanges. All utilities are maintained at atmosphere and are accessed through standard o-ring compression fittings for ease of installation in any vacuum system.

High Performance

Angstrom Sciences’ magnetrons operate at low process pressures, in the 10-4 Torr range and can deliver practical power densities in excess of 300 watts per square inch. Higher power densities allow ONYX® magnetrons to maximize both the process coating zone and target utilization without compromising sputter rate.

Better Film Uniformity

Standard ONYX® magnetron sputtering cathodes routinely provide deposition uniformities in the ±3 - ±5% range; however, Angstrom Sciences provides magnet arrays to suite client specifications. One research customer has even documented uniformity of ±0.1% with an ONYX® magnetron.

Cleaner Process

The addition of an anode shield permits operation at lower voltage and pressure, because the anode shield decreases the distance between the cathode and anode (ground plane). Shields also blocks debris from falling in the space between the anode and cathode, preventing electrical short circuits and arcing.

Full Range of Sizes

Angstrom Sciences’ circular magnetrons are available in 1-16 inch target diameters. Linear magnetrons are available in target widths of 1.5 to 12 inches and in target lengths from 1 to 13 feet. Rotating cylindrical magnetron sputtering cathode assemblies are designed to accommodate target diameters from 3-6 inches in diameter.

Total Commitment

Magnetron sputtering cathodes are Angstrom Sciences’ core product, and we are committed to making sure you have the highest quality sputter deposition tool. Every ONYX® magnetron is ensured against flaws in workmanship and materials for 2 years - the longest warranty in the industry. We stand ready to provide you any help you may need in specification, installation, start-up, and service.

PST offers sales and service for Angstrom Sciences Magnetron Sputtering Technology and Supttering Materials. Mark Bernick founded Angstrom Sciences, Inc. in 1988 to supply advanced magnetrons and refined materials for plasma vapor deposition of high quality thin films. With a strong focus on research and developement, the company soon patented several technical advancements in magnetics, water cooling, and circular magnetron clamping designs. The features of the Angstrom Advantage^TM have created the most advanced and easy-to-use magnetrons in the thin film industry.

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Angstrom Sciences Magnetron Sputtering Technology

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Angstrom Sciences Magnetron Sputtering Technology

Video

Angstrom Circular Magnetron

Angstrom Cylindrical Magnetron

Angstrom Linear Magnetron

Angstrom Custom Magnetron

Angstrom ONYX-Φlux Control

About PST

Partner

Links

Search

Angstrom
Circular Magnetron

Angstrom
Cylindrical Magnetron

Angstrom
Linear Magnetron

Angstrom
Custom Magnetron

Angstrom
ONYX-Φlux Control